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MEMSnet Home: MEMS-Talk: plastic mask (or film mask) for su-8 contact lithography
plastic mask (or film mask) for su-8 contact lithography
2009-03-16
郑瑞麟(Ruilin Zheng)
2009-03-16
Pavan Samudrala
2009-03-16
Brian Stahl
2009-03-16
Jon R. Fox
2009-03-16
[email protected]
2009-03-16
walter
plastic mask (or film mask) for su-8 contact lithography
[email protected]
2009-03-16
Hi all,

I have followed this communication and I am very interested to know
more about these mylar film masks and where to get them and how would
you have your design on them. I really Appreciate it if you could
provide me with this information.
Thank you

Syd




Quoting "Jon R. Fox" :

> Yes, the emulsion should be in contact with the SU-8, it won't work
> well if it is on the other side of the plate millimeters away (unless
> you have a very well collimated light source).
>
> If you have problems with SU-8 sticking too much, you can always
> transfer your pattern to a chromium coated glass/quartz plate with
> conventional lithography and then you can clean your newly made mask
> with acetone when it gets sticky. There are vendors who can supply
> plates of glass ready for this procedure.
>
> Best Regards,
> Jon Fox
reply
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