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MEMSnet Home: MEMS-Talk: plastic mask (or film mask) for su-8 contact lithography
plastic mask (or film mask) for su-8 contact lithography
2009-03-16
郑瑞麟(Ruilin Zheng)
2009-03-16
Pavan Samudrala
2009-03-16
Brian Stahl
2009-03-16
Jon R. Fox
2009-03-16
[email protected]
2009-03-16
walter
plastic mask (or film mask) for su-8 contact lithography
walter
2009-03-16
greetings
We do a lot of experimental work with SU 3050 and others
If we use acetate masks we place them between 2 plates One side has some
scotch tape so we can open it like a door of sorts.This works and the
acetate remains flat /clean.
Glass thickness approx 500- 700 microns.
The other advantage if the glass becomes contaminated replace it..
[email protected]
Terry

----- Original Message -----
From: "???(Ruilin Zheng)" 
To: 
Sent: Monday, March 16, 2009 2:36 AM
Subject: [mems-talk] plastic mask (or film mask) for su-8 contact
lithography


> Hello,
>
> I just bought some plastic mask, and I attached them onto a glass plate.
> I want to use these mask for contact lithography on SU-8 layer.
> I am wondering if the SU-8 layer would stick to the plastic mask after
> exposure. Or should I use the opposite side of the mask (i.e. glass plate)
> for contact with SU-8 layer?
>
> But in this way, the lithography won't be the contact one.
> Does anyone has that experience? Please give me some advices.
reply
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