Dear Dr. Mihaela Carp,
thanks in advance for you suggestions. If i well understand you suggest me
to make the hard bake also to the Uncrosslinked part of the SU-8 , but i'm
afraid that doing the hard bake to the Uncrosslinked SU-8, this last one
can undergoes to deformations losing its planar characteristics(Tg of
Uncrosslinked SU-8 is 55°C)...with this omincoat there is the possibility
that the wrinkles in the uncrosslinked SU-8 doesn't appear?...However i'm
going to do the Hard bake in a vacuum oven i will inform you as soon as
possible of the results!
Thanks again!