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MEMSnet Home: MEMS-Talk: Uncured SU-8 crack
Uncured SU-8 crack
2009-03-16
Andrea Lucibello
2009-03-17
Andrew Sarangan
2009-03-18
Aniruddh Sarkar
2009-03-18
Andrea Lucibello
2009-03-18
Andrew Sarangan
2009-03-19
%Mihaela Carp
2009-03-19
[email protected]
2009-03-20
Brubaker Chad
Uncured SU-8 crack
[email protected]
2009-03-19
Dear Dr.  Mihaela Carp,

thanks in advance for you suggestions. If i well understand you suggest me
to make the hard bake also to the Uncrosslinked part of the SU-8 , but i'm
afraid that doing the hard bake to the Uncrosslinked SU-8,  this last one
can undergoes to deformations losing its planar characteristics(Tg of
Uncrosslinked SU-8 is 55°C)...with this omincoat there is the possibility
that the wrinkles in the uncrosslinked SU-8 doesn't appear?...However i'm
going to do the Hard bake in a vacuum oven i will inform you as soon as
possible of the results!

Thanks again!

reply
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