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MEMSnet Home: MEMS-Talk: Ti-Si Ohmic contact...
Ti-Si Ohmic contact...
2009-03-26
Javier Crespo
2009-03-26
Bill Moffat
2009-03-26
Ruiz, Marcos Daniel (SENCOE)
2009-03-27
Yongliang Yang
Ti-Si Ohmic contact...
Javier Crespo
2009-03-26
Hello,

Does anyone know how could I improve the ohmic contact of the sputtered
Ti layer with silicon? I know that there are some differences if the
Silicon is N or P-type, but in both cases I can't have a good contact.

Should I use TiW in case of Ti?

Best regards,
reply
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