An inert gas plasma will increase the surface area giving better
contact.  Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Javier Crespo
Sent: Thursday, March 26, 2009 2:05 AM
To: [email protected]
Subject: [mems-talk] Ti-Si Ohmic contact...

Hello,

Does anyone know how could I improve the ohmic contact of the sputtered
Ti layer with silicon? I know that there are some differences if the
Silicon is N or P-type, but in both cases I can't have a good contact.

Should I use TiW in case of Ti?