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MEMSnet Home: MEMS-Talk: PDMS mold bends after 100C baking
PDMS mold bends after 100C baking
2009-03-27
Shao Guocheng
2009-03-29
[email protected]
2009-03-30
Shao Guocheng
2009-03-30
Gareth Jenkins
PDMS mold bends after 100C baking
Shao Guocheng
2009-03-27
hi, friends:

     I'm working on some PDMS molding process and encountering a problem. I can
successfully got PDMS replica from SU-8 master mold. But then I need to use the
PDMS replica as mold and try to SU-8 replica from that PDMS mold. and that's
when problem happens. The PDMS mold with SU-8 poured into it needs to undergo a
100C baking process to evaporate SU-8 solvent, since my SU-8 layer is thick,
after about 10 hours baking, the SU-8 layer seems fine, but the PDMS mold itself
bended. Does any one have faced similar problems? or any one know what is the
highest temperature that PDMS can undergo without causing bending or other
deformation? I thought people sometimes cure PDMS under much higher temperature
withou any problem.... Thanks in advance.

Guocheng Shao

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