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MEMSnet Home: MEMS-Talk: higher-temperature photoresist
higher-temperature photoresist
1998-09-30
[email protected]
higher-temperature photoresist
[email protected]
1998-09-30
Hello,

I'm looking for a photoresist process with the following characteristics:
1    Can be rendered photoinactive by some process
2    Can then be patterned by dry etching, and retain that pattern even
when subsequently subject to 230C
3    Can still be removed cleanly after the 230C temperature cycle

Thank you for suggestions,
Robert Mihailovich
Rockwell


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