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MEMSnet Home: MEMS-Talk: air-bridge fabrication problem
air-bridge fabrication problem
2009-03-30
Yang Fu
2009-03-30
Samadhan B. Patil
2009-03-30
Brad Cantos
2009-03-30
Robert MacDonald
2009-03-30
Brad Cantos
2009-03-31
Yang Fu
2009-03-31
Brad Cantos
2009-03-31
abhaya joshi
air-bridge fabrication problem
Yang Fu
2009-03-31
Hi,

Thank you for the advice. For Brad's question, I do not see noticeable
rounding of the PR (using stylus profiler). I am going to fabrication more
samples to get a better idea of the rounding. I will try both of your
advices to solve this problem. Could someone throw light on where does these
bubbles come from? They appear when I bake the second PR layer after
exposure if the hard bake for the first PR layer is not long enough. Thank
you.

Sincerely

Crayon Fu
University of Virginia
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