Hi,
Thank you for the advice. For Brad's question, I do not see noticeable
rounding of the PR (using stylus profiler). I am going to fabrication more
samples to get a better idea of the rounding. I will try both of your
advices to solve this problem. Could someone throw light on where does these
bubbles come from? They appear when I bake the second PR layer after
exposure if the hard bake for the first PR layer is not long enough. Thank
you.
Sincerely
Crayon Fu
University of Virginia