Hello, Kamlesh,

I experienced that before, and I think the volume decrease is due to too
much loss of solvent during soft-bake.

Try to turn your soft-bake temperature down or cut down the baking time. It
should be working.

On Tue, Mar 31, 2009 at 3:54 PM,  wrote:

> hi all
>      i am spin coating SU8 2050 on piranha cleaned silicon wafer but
>    during prebake it is shrinking and coming into the center of the
>    wafer. What could be the possible cause ?
> --
> Kamlesh Pawar


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郑瑞麟

Ruilin Zheng

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