Hello Kamlesh!

I have had a similar problem with another resist: it shrunk during the
pre-bake step. I thaught about some kind of problem due to the viscosity of
the resist. In order to solve the problem, I increased spinning time by
~200% and adjusted the spinning speed to keep the same thickness.
Hope this help!

Kind regards,
Edouard Duriau


On Tue, Mar 31, 2009 at 9:54 AM,  wrote:

> hi all
>      i am spin coating SU8 2050 on piranha cleaned silicon wafer but
>    during prebake it is shrinking and coming into the center of the
>    wafer. What could be the possible cause ?
> --
> Kamlesh Pawar