AZ 9200 type resists are very usefull for process of thick positive resist.
Maybe you can prefer other thick resist  (AZ 4562)

Tolga YELBOGA
Project Engineer
Nanotechnology Researh Center
Bilkent University
Bilkent, Ankara 06800 TURKEY
Voice: 90-312-290-1020
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: David Roberts [mailto:[email protected]]
Sent: Thursday, April 02, 2009 8:01 PM
To: [email protected]; 'General MEMS discussion'
Subject: Re: [mems-talk] Thick positive photoresist revisited

Hi Thomas,

Plated nickel is used as a DRIE etchmask. 1.)Photolith 2.) Ni plate 10-20um
thick 3.) Strip resist 4.) Strip seed 5.) DRIE

Regards,
Dave