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MEMSnet Home: MEMS-Talk: Circular grooves in {100}-Si
Circular grooves in {100}-Si
2009-04-19
Kim
2009-04-19
Andrea Mazzolari
2009-04-19
Lynn Rathbun
2009-04-20
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2009-04-20
Kim
2009-04-20
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2009-04-21
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Circular grooves in {100}-Si
Kim
2009-04-19
Hi
Is it possible to make circular grooves (about 50 um deep) in {100}-Si by wet
etching.

Any suggestion will be highly appreciated.

Best regards
Kim
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