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MEMSnet Home: MEMS-Talk: Circular grooves in {100}-Si
Circular grooves in {100}-Si
2009-04-19
Kim
2009-04-19
Andrea Mazzolari
2009-04-19
Lynn Rathbun
2009-04-20
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2009-04-20
Kim
2009-04-20
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2009-04-21
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Circular grooves in {100}-Si
Andrea Mazzolari
2009-04-19
Hi Kim,
if you are not interested to have perpendicular walls you can use
isotropic etch (HNA). You will have a meniscus-like shape.

Best regards,
Andrea

> Hi
> Is it possible to make circular grooves (about 50 um deep) in {100}-Si by
> wet etching.
>
> Any suggestion will be highly appreciated.
>
> Best regards
> Kim
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