Do you mean semicircular in cross section?  And do you mean really
semicircular, or merely semi oval?

At 05:51 AM 4/19/2009, you wrote:
>Hi
>Is it possible to make circular grooves (about 50 um deep) in
>{100}-Si by wet etching.
>
>Any suggestion will be highly appreciated.
>
>Best regards
>Kim

Dr. Lynn Rathbun                                        Rathbun@cnf.cornell.edu
NNIN  Program Manager                   (607)-254-4872
CNF Laboratory Manager
Duffield Hall                                                (607)-255-8601 Fax
Cornell
University                                       (607)-592-1549 Work Cell
Ithaca, New York 14853                     (607)-342-1880 Personal Cell