Do you mean semicircular in cross section?  And do you mean really
semicircular, or merely semi oval?

At 05:51 AM 4/19/2009, you wrote:
>Hi
>Is it possible to make circular grooves (about 50 um deep) in
>{100}-Si by wet etching.
>
>Any suggestion will be highly appreciated.
>
>Best regards
>Kim

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