Tommy,

It has been a while since I worked with polysilicon, so I am
giving these numbers to you without further cheching my memory:
Depending on process condition, I used 140GPa for Young's
modulus. Sometimes that number can go up to 170GPa. Most solid
has Poisson's ratio of 0.3 so that's the number I used. More than
a few mems paper in the early 90's reported on Young's modulus
measurements.

Patrick Cheung, research scientist   Xerox PARC, MS 35-1674
(O) 650-812-4338 (FAX) 650-812-4334   3333 Coyote Hill Road
[email protected]                  Palo Alto, CA 94304
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On Thu, 17 Sep 1998, Tommy Roussel wrote:

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I was wondering if anyone could give me the material properties of
polysilicon.  I have found the pre-formed properties (solubility, etc) but
can't seem to locate Young's modulus or Poisson's ratio.

Thanks,

Tommy Roussel
[email protected]
http://www.ifm.latech.edu

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I was=20
wondering if anyone could give me the material properties of =
polysilicon. =20
I have found the pre-formed properties (solubility, etc) but can't seem =
to=20
locate Young's modulus or Poisson's ratio.
 
Thanks,
 
Tommy =
Roussel
[email protected]

http://www.ifm.latech.edu

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