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MEMSnet Home: MEMS-Talk: gain size of Al thin film
gain size of Al thin film
2009-04-28
li shifeng
2009-04-30
Henn, Gudrun: Ms.
gain size of Al thin film
li shifeng
2009-04-28
Hi, All,

I used e-beam evaporator to deposit 50nm to 100nm thick Al thin film on the
glass substrate. The gain size of Al is up to 50nm. I just wonder if there is
any method to reduece the gain size of Al on the substrate. Thanks for sharing
any information.

shifeng
reply
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