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MEMSnet Home: MEMS-Talk: scratch and dig specs for anodic bonding
scratch and dig specs for anodic bonding
2009-04-28
Robert MacDonald
2009-04-28
Mehmet Aykol
2009-04-30
[email protected]
2009-04-30
Shay Kaplan
scratch and dig specs for anodic bonding
Robert MacDonald
2009-04-28
Does anyone have standard specifications for pyrex wafer surface finish
to achieve a good hermetic anodic bond to Si (assuming good conditions).

In particular, I'm looking for a scratch and dig spec, or a surface
roughness specification.

Thanks,

Rob MacDonald

[email protected]
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