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MEMSnet Home: MEMS-Talk: Looking for high speed method to dice pyrex wafer
Looking for high speed method to dice pyrex wafer
2009-05-01
杜 彦召
2009-05-01
Roger Shile
Looking for high speed method to dice pyrex wafer
Roger Shile
2009-05-01
For Pyrex you should use a resonoid blade (with diamond).  Theromcarbon
is one manufacturer.

Roger Shile

-----Original Message-----
Hello

I am looking for a good way to dice pyrex glass wafer used for mems
package.
We now use diamond blade to do that but it is vvry slow and the cost is
high.
Does anyone know some other method for dicing pyrex wafer, for example
laser?

Thank you
reply
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