Hi all!
I'm trying to think of a way to make a 2mm diameter through hole in a pyrex
wafer.
I thought of etching the hole with DRIE, but thought it was inefficient and time
consuming.
It also seems that I can't use conventional drilling machines to bear holes in
the pyrex as the substrate is to brittle.
Does anyone know how to drill holes in pyrex/glass wafers?
The features don't have to be too accurate..
Thanks!
TJ