TJ,You can use diamond drill bits to drill Pyrex wafers that is 500microns
or thicker. That is how I drill my ports for fluidic devices. I am not using
anything special simple diamond bits. If you want details email me.

Mehmet

On Fri, May 1, 2009 at 1:31 PM, 김태진  wrote:

> Hi all!
>
> I'm trying to think of a way to make a 2mm diameter through hole in a pyrex
> wafer.
>
> I thought of etching the hole with DRIE, but thought it was inefficient and
> time consuming.
>
> It also seems that I can't use conventional drilling machines to bear holes
> in the pyrex as the substrate is to brittle.
>
> Does anyone know how to drill holes in pyrex/glass wafers?
>
> The features don't have to be too accurate..
>
> Thanks!
>
> TJ

--
Mehmet Aykol
University of Southern California
EE - Electrophysics
Phone: (213) 821-4090