I also have the same question. But I want to drill a array of holes through
glass or any other transparent(to visible light) materials and the diameter
is around 400 micron. Hope some one can help us.

Gong

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From: "김태진" 
Sent: Friday, May 01, 2009 3:31 PM
To: 
Subject: [mems-talk] Bearing holes in pyrex/glass wafers

> Hi all!
>
> I'm trying to think of a way to make a 2mm diameter through hole in a
> pyrex wafer.
>
> I thought of etching the hole with DRIE, but thought it was inefficient
> and time consuming.
>
> It also seems that I can't use conventional drilling machines to bear
> holes in the pyrex as the substrate is to brittle.
>
> Does anyone know how to drill holes in pyrex/glass wafers?
>
> The features don't have to be too accurate..
>
> Thanks!
>
> TJ
>
>