Hello this is Henri from France.

The best way and cheapest way is to put wax and with the appropriate
etch liquid at a certain temp you will do it.

Rie is too expensive.
I will go through my note book and find that for you.
Please be patient.
Henri

2009/5/1 김태진 

> Hi all!
>
> I'm trying to think of a way to make a 2mm diameter through hole in a pyrex
> wafer.
>
> I thought of etching the hole with DRIE, but thought it was inefficient and
> time consuming.
>
> It also seems that I can't use conventional drilling machines to bear holes
> in the pyrex as the substrate is to brittle.
>
> Does anyone know how to drill holes in pyrex/glass wafers?
>
> The features don't have to be too accurate..
>
> Thanks!
>
> TJ