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MEMSnet Home: MEMS-Talk: Bearing holes in pyrex/glass wafers
Bearing holes in pyrex/glass wafers
2009-05-01
김태진
2009-05-01
Mehmet Aykol
2009-05-01
Kirt Williams
2009-05-02
Brian Stahl
2009-05-02
[email protected]
2009-05-02
Xiaoguang Liu
2009-05-02
Jackgong Hotmail
2009-05-02
HENRI FLECHNER
2009-05-03
Jackgong Hotmail
2009-05-04
Fei Wang
2009-05-04
Robert MacDonald
2009-05-06
김태진
2009-05-04
%Mihaela Carp
2009-05-02
HENRI FLECHNER
2009-05-03
tarun mudgal
2009-05-05
Jackgong Hotmail
2009-05-04
Tomblin, Graham
Bearing holes in pyrex/glass wafers
Jackgong Hotmail
2009-05-03
Hi, Henri

Thanks for your point! Would you provide more details about how to make
array with holes in metal based on your experiences? Just do lithography and
wet etch or any tricks? Appreciate!

Gong

--------------------------------------------------
From: "HENRI FLECHNER" 
Sent: Saturday, May 02, 2009 2:38 PM
To: "General MEMS discussion" 
Subject: Re: [mems-talk] Bearing holes in pyrex/glass wafers

> In this case an aray with holes in metal is necessary, as you do whe
> making
> CV plots.
> Henri
reply
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