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MEMSnet Home: MEMS-Talk: Bearing holes in pyrex/glass wafers
Bearing holes in pyrex/glass wafers
2009-05-01
김태진
2009-05-01
Mehmet Aykol
2009-05-01
Kirt Williams
2009-05-02
Brian Stahl
2009-05-02
[email protected]
2009-05-02
Xiaoguang Liu
2009-05-02
Jackgong Hotmail
2009-05-02
HENRI FLECHNER
2009-05-03
Jackgong Hotmail
2009-05-04
Fei Wang
2009-05-04
Robert MacDonald
2009-05-06
김태진
2009-05-04
%Mihaela Carp
2009-05-02
HENRI FLECHNER
2009-05-03
tarun mudgal
2009-05-05
Jackgong Hotmail
2009-05-04
Tomblin, Graham
Bearing holes in pyrex/glass wafers
Fei Wang
2009-05-04
Hi, Gong,

I think lift off would be the easiest way to make array with holes in
metal. If you want much thicker metal layer, you can also try
electroplating.

Best regards,
Fei

2009/5/3, Jackgong Hotmail :
> Hi, Henri
>
> Thanks for your point! Would you provide more details about how to make
> array with holes in metal based on your experiences? Just do lithography and
> wet etch or any tricks? Appreciate!
>
> Gong
>

Best regards,
Yours sincerely
Fei Wang
______________
Postdoctoral researcher, Dr
MIC - Department of Micro and Nanotechnology
Technical University of Denmark (DTU)
Building 344, 1st floor, Room no. 130
DK-2800, Kgs. Lyngby
Denmark
Tel:  +45 4525 6311
Fax:  +45 4588 7762
Email: [email protected]
       http://www.nanotech.dtu.dk
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