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MEMSnet Home: MEMS-Talk: W or Mo in NH4OH
W or Mo in NH4OH
2009-05-05
Taekyung Kim
W or Mo in NH4OH
Taekyung Kim
2009-05-05
Hi all,

I am wondering if W or Mo is ok in a mild NH4OH (~5%) for SC1 cleaning prior
to TEOS deposition.

Thanks

TK
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