Evelyn,
       Lift off profile is generally regarded as an over hang
deliberately created in the resist profile.  So when the metal is
deposited it can not cover the overhanging resist side wall.  See
example, in attachment.  Bill Moffat.

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of saravan kallempudi
Sent: Sunday, May 03, 2009 4:06 AM
To: [email protected]
Subject: Re: [mems-talk] Lift-off Profile

Dear Evelyn,

For lift off the best suited one is sputter deposition and it is the one
which makes an conformal layer.

The coverage depends on the type of PR you are going to use. In order to
perform a successful liftoff using image reversal process, the thickness
of PR should be atleast 2 times of the metal thickness.

--Saravan