Dear Ashwini,

I would recommend that you check with the manufacturer
(Oerlikon/Leybold) before you make any changes.  The DryVac series are
oil-less pumps, meaning that the main exchange chamber is dry sealed.
The bearing chambers, there are two, are typically lubricated with a
Fomblin or similar type PFPE oil.  I would check with Leybold to make
sure which chamber requires which lubricant.  One requires oil and one
requires grease.  I really don't recall which gets which.  I'm sure that
the manufacturer can send you a users manual.

Good Luck!
Mike



-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of ashwini jambhalikar
Sent: Monday, May 11, 2009 7:59 AM
To: General MEMS discussion
Subject: [mems-talk] DryVac Pump gear box oil

Hello ,
Does anybody know which oil is to be put in gear box of Leybold 50S
DryVac Pump and Leybold 250S DryVac Pump ?
These pumps are part of DRIE system.
AShwini.