Hi Andrea,
I deal with a number of polishers around the world for flat wafers and none of
them are capable of meeting a Site Flatness of 60 nm ( .06 um). The Best I have
seen is 0.2um (200nm ) and that would only be on 85% of the sites with edge
exclusion on a 100mm coplanar polished DSP wafer.
Should you find anyone - Please let us know as well.
Best Regards
Ken Smith
-----Original Message-----
>From: Andrea Mazzolari
>Sent: May 28, 2009 9:54 AM
>To: General MEMS discussion
>Subject: [mems-talk] Silicon wafers suppliers.
>
>Hi All,
>i'm looking for a Silicon wafer supplier who can provide silicon wafers
>with site flatenss of about 60nm over areas of 26x8mm
>Is there any suggestion ?
>
>Thanks,
>Andrea
Kmbh Technologies
[email protected]
47 Rocket Circle Rancho Cordova, CA USA 95742
Phone +1 510-714-5055 FAX+1 510-217 4421
Standard and Specialty CZ and FZ Silicon, Glass and other wafers.