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MEMSnet Home: MEMS-Talk: metallization on PDMS
metallization on PDMS
2009-06-01
nidhi maheshwari
2009-06-01
Pavan Samudrala
2009-06-01
Barbara Cortese
2009-06-03
nidhi maheshwari
2009-06-03
Joshua Tice
2009-06-03
Ruiz, Marcos Daniel (SENCOE)
2009-06-03
Barbara Cortese
2009-06-04
nidhi maheshwari
2009-06-04
Barbara Cortese
2009-06-04
Pavan Samudrala
metallization on PDMS
nidhi maheshwari
2009-06-01
Dear All,

For some of my experiments I need to have metal patterns onto PDMS. I
have gone through the litreature available on net and found that
plasma oxidation followed by e-beam evaporation of metals form stable
metal films. As we dont have an e-beam system for evaporation of gold.
I tried depositing Chrome-Gold layers by sputter after plasma
oxidation of PDMS. What I obtained was buckled metal layers. Can
anyone please suggest some method to get rid of the buckling/ waves
formed.

Regards,
Nidhi Maheshwari
IIT Bombay
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