Hi,

Barbara, thanks for your reply.  I tried reducing the thickness of PDMS
to around 200-300 microns by spin coating it onto a glass wafer. After
curing and plasma oxidation I tried sputter of Chrome and Gold. But it
still showed the same cracked layer. Can you or someone else please
suggest as to what I should be doing to avoid these cracked metal
films.

warm regards,
Nidhi


On Mon, Jun 1, 2009 at 11:32 PM, Barbara Cortese  wrote:
> Hi Nidhi,
>
> PDMS is an elastic material so thick layers will have some stress and will not
result uniform
> but you will have what you see. That's the main reason for using e-beam
evaporation.
> you should reduce the layer thickness you're depositing.