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MEMSnet Home: MEMS-Talk: spincoat polystyrene on PDMS structure
spincoat polystyrene on PDMS structure
2009-06-05
Shao Guocheng
2009-06-05
Brian Stahl
2009-06-05
Kumar, Parshant
2009-06-05
Barbara Cortese
spincoat polystyrene on PDMS structure
Barbara Cortese
2009-06-05
Toluene will swell PDMS and disrupt the structure.  I would suggest changing the
solvent to a less aggressive one.


> Hi..
>
> Toluene solvent is good for thinning PDMS. I have used it for getting
> PDMS films down to submicron level with extensive dilution of toluene. I
> guess, it would be ok for dilution of polystyrene too. Probably, you
> could do the surface prep before spinning on polystyrene. Like cleaning
> surface with methanol and then plasma activation and then do immediately
> coating of polystyrene.
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