Hello Moshe,

You should be able to etch 20,000 ohm/cm Si with KOH just fine.  The exact
etch rate is difficult to predict and will depend on several factors, most
significantly the etchant concentration and temperature.  You'll have to
experiment to determine exact etch rates for your system, but you should be
able to easily fabricate V-grooves.  There is a wealth of literature on the
wet anisotropic etching of silicon, I suggest running a quick google scholar
search.  The papers of Seidel, et al. and Shikida, et al. are a good place
to start.

Good luck,

Brian C. Stahl
Graduate Student Researcher
UCSB Materials Research Laboratory
[email protected] / [email protected]
Cell: (805) 748-5839
Office: MRL 3117A


On Sun, Jun 7, 2009 at 12:28 AM, Moshe  wrote:

> Hello
> I want to etch Silicon 100 with resistivity > 20,000 Ohm/cm
> Is it possible to etch this Silicon type  with KO  solution ?
> If yes,
> What is the etch rate ?
> Can the fabricate  is V groove ?
>
> Thank You, Moshe