I need an estimate of Young's modulus (E) and the coefficient of thermal
expansion (CTE) of Novolac based positive PR films of thickness 3-10 um.
The AZ9000 series PR would be a good example.

In particular I need an estimate for such films after softbake (90-100C)
and also after mild hard bake (around 115-120C).  The estimate can be
very approximate.

If you know some values or could point me to a reference with this
information, I would be grateful.

Thanks -
Don Friedrich
JDSU - Applied Optical Technologies
Santa Rosa, CA
[email protected]