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MEMSnet Home: MEMS-Talk: (110) wafers cleaving planes
(110) wafers cleaving planes
2009-06-06
Andrea Mazzolari
2009-06-20
Yongliang Yang
(110) wafers cleaving planes
Yongliang Yang
2009-06-20
Maybe the primary falt is along <211> direction.

you can etch the wafer in KOH with rectangle mask to determine the crystal
direction.

2009/6/7 Andrea Mazzolari 

> Hi all,
>
> which are the cleaving planes for (110) wafers ?  I've tried to find this
> info on the web, but was not able :(
>
> Thanks,
> Andrea
>
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