Dear colleques,

     We are currently looking for any company/university group, who have in
     their possession a system for HF vapor phase etching of silicon oxide.

     We would like to have some trials run (at cost) on samples of a new
     sensor structure containing a phosporus-doped silicon oxide
     sacrificial layer.

     If anyone is interested, or has any advice on where to locate such a
     system please feel free to contact me.


     Michael Pedersen, Ph.D.
     Research Engineer

     Knowles Electronics Inc.
     2800 West Golf Road
     Rolling Meadows, IL 60008
     USA

     Phone: (847)-437-8090 x334
     Fax: (847)-437-8144
     e-mail: [email protected]