Hi all,
I am planning on depositing an SiO film on top of a BST film and would like
to get an idea as to how thick I should make the SiO layer in order to
protect the BST layer. I will be using e-beam evaporation for the SiO
deposition and I understand that it is not conformal. Since I am using SiO
as a passivation layer and the film to be protected is 500 nm thick, I would
like to know if the SiO layer has to be larger than 500 nm or whether it can
be smaller; say 400 nm. Is there a rule of thumb out there that would
ensure good step coverage?
Thanks,
--
EVELYN BENABE
Graduate Research Assistant
RF Microsystems Research Group
University of South Florida
4202 East Fowler Avenue
Tampa, FL 33620
Office: ENB 412
Office Phone: (813)-974-4851
