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MEMSnet Home: MEMS-Talk: Oxidation of Molybdenum
Oxidation of Molybdenum
2009-06-29
Pradeep Dixit
2009-06-29
mikas remeika
2009-06-30
Gary Hillman
2009-06-30
ozgur celik
2009-07-01
Pradeep Dixit
Oxidation of Molybdenum
Pradeep Dixit
2009-06-29
Hello Everyone,

I would like to check something with you:

1. Has any one tried to electroplate copper on a Molybdenum seed layer ?

2. I think, Molybdenum oxidizes easily.  Does anyone have an idea on how to
remove
Molybdenum oxide ? wet etching or dry plasma etching?

Any suggestions will be highly appreciated.

Thanks in advance.

Pradeep Dixit
reply
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