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MEMSnet Home: MEMS-Talk: Oxidation of Molybdenum
Oxidation of Molybdenum
2009-06-29
Pradeep Dixit
2009-06-29
mikas remeika
2009-06-30
Gary Hillman
2009-06-30
ozgur celik
2009-07-01
Pradeep Dixit
Oxidation of Molybdenum
mikas remeika
2009-06-29
Here's a website that has a lot of info on etching recipes:
http://www.ee.byu.edu/cleanroom/wet_etch.phtml

On Mon, Jun 29, 2009 at 1:26 AM, Pradeep Dixit wrote:
> Hello Everyone,
>
> I would like to check something with you:
>
> 1. Has any one tried to electroplate copper on a Molybdenum seed layer ?
>
> 2. I think, Molybdenum oxidizes easily.  Does anyone have an idea on how to
remove
> Molybdenum oxide ? wet etching or dry plasma etching?
>
> Any suggestions will be highly appreciated.
>
> Thanks in advance.
>
> Pradeep Dixit
reply
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