A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: anodic bonding with one wafer having metal patterns
anodic bonding with one wafer having metal patterns
2009-07-04
nidhi maheshwari
2009-07-06
Prasanna Srinivasan
2009-07-05
tarun mudgal
anodic bonding with one wafer having metal patterns
nidhi maheshwari
2009-07-04
Dear All,

I have metal patterns (Cr-Au and Platinum) in channels formed in
silicon/silicon dioxide. I would like to bond this with a Pyrex wafer.
Can you please suggest if anodic bonding of the patterned
silicon/silicon dioxide and pyrex would be the best method to bond or
I need to follow some other process for bonding. I am a bit doubtful
of the implications of high voltage and temperature used for anodic
bonding on the metal patterns.

Any help in this regard would be highly appreciated.

Regards,
Nidhi
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
The Branford Group
Process Variations in Microsystems Manufacturing
MEMStaff Inc.