Dear Friends,

I had some questions related to  PhotoResist ashing using DRIE chamber.

We have STS ASE DRIE.

1. If metal pads are beneath PhotoResist and metal gets exposed for
one or two minutes to Oxygen plasma, what can be the side effects.

STS has strictly told that metal should not be exposed in Chamber to
avoid micro masking related issues/ chamber contamination.


I will like to know if any body is using DRIE chamber for photoresist
ashing, and if so, have they faced any problems related to chamber
contamination.

Metals likely to get exposed are: Aluminium , Gold


Waiting for the reply,
--
Ashwini