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MEMSnet Home: MEMS-Talk: Peel off PDMS
Peel off PDMS
2009-07-09
Shah, Forum N
2009-07-09
[email protected]
2009-07-10
Shah, Forum N
2009-07-11
Andrew Sarangan
2009-07-13
Shah, Forum N
2009-07-09
Andrew Sarangan
2009-07-10
Shah, Forum N
2009-07-10
Liang Zhao
2009-07-11
Barbara Cortese
Peel off PDMS
Liang Zhao
2009-07-10
hi,

try to pour more PDMS on it and bake in the oven, after bake, you can
peel it off.



2009/7/10 Shah, Forum N 

> Hi,
>
> I am spinning PDMS on Si wafer on which the sensors would be fabricated.
>
> Can anyone suggest a way to peel off the PDMS layer from the Si wafer  once
> the fabrication process is over?
>
> When I tried using acetone it rather just removes the PDMS in an irregular
> fashion and does not let me peel off the PDMS layer completely keeping it
> intact.
>
> Thanks,
>
> Forum

--
赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University
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