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MEMSnet Home: MEMS-Talk: Glass wafer cleaning with aluminium layer
Glass wafer cleaning with aluminium layer
2009-07-09
Nicolas Vergauwe
2009-07-09
Bill Moffat
2009-07-10
Alexandre BOE
2009-07-10
Serban Rebegea
Glass wafer cleaning with aluminium layer
Serban Rebegea
2009-07-10
@Nicolas Vergauwe

Hi,

I think that a good solution in your case would be ultrasound cleaning. If
using a small frequency, you should be able to clean the dust without
affecting the aluminium foil.

Best regards,

Serban Rebegea
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