Hi Bernd,

Thanks for your suggestion. The AZ patterns on my samples are around tens of
micron, so, as you said the pattern will smear in nanometer scale, can I say it
should not be a problem about that? It might be difficult for me to vacuum seal
the samples because I need to use them at about few samples per week. From your
experiences, does it make sense if I keep some desiccants in the package to keep
them dry?

Thanks,
Yingtao

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of Krueger, Bernd
Sent: 13 July 2009 08:20
To: General MEMS discussion
Subject: [mems-talk] Storage of developed AZ photoresist

Hi Yingtao,

Unexposed AZ resist could be stored for more than 6 month when it is vacuum
sealed. The same is true for exposed resist. Be carefull if you have very tiny
pattern. Storage will smear a few nm and will end with the loss of sharp edges
in any dimensions. We have tested 100nm lines and storage of 1h to 5d. If
possible you can freeze the vacuum sealed material to decrease this effect.
Reminder: to avoid moisture do not open package before it has reached room
temperature.

Regards,

Bernd