Hi Yingtao,
If you will normally do the post exposure bake you can do it before you will
develop the samples. Otherwise you do not have to bake them.
Regards,
Bernd
-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von Y.Tian
Gesendet: Montag, 13. Juli 2009 21:58
An: General MEMS discussion
Betreff: Re: [mems-talk] Storage of developed AZ photoresist
Hi Bernd,
That's a good point. I will try to find a proper exsiccator for them. Also, do
you have any idea about re-bake the AZ before using them, if the sample has been
left for weeks?
Regards,
Yingtao