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MEMSnet Home: MEMS-Talk: Storage of developed AZ photoresist
Storage of developed AZ photoresist
2009-07-10
Y.Tian
2009-07-13
Krueger, Bernd
2009-07-13
Y.Tian
2009-07-13
Krueger, Bernd
2009-07-13
Y.Tian
2009-07-15
Krueger, Bernd
Storage of developed AZ photoresist
Krueger, Bernd
2009-07-15
Hi Yingtao,

If you will normally do the post exposure bake you can do it before you will
develop the samples. Otherwise you do not have to bake them.

Regards,

Bernd

-----Ursprüngliche Nachricht-----
Von: [email protected] [mailto:[email protected]] Im
Auftrag von Y.Tian
Gesendet: Montag, 13. Juli 2009 21:58
An: General MEMS discussion
Betreff: Re: [mems-talk] Storage of developed AZ photoresist

Hi Bernd,

That's a good point. I will try to find a proper exsiccator for them. Also, do
you have any idea about re-bake the AZ before using them, if the sample has been
left for weeks?

Regards,
Yingtao
reply
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