A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: how to delay the plasma bonding?
how to delay the plasma bonding?
2009-07-18
Liang Zhao
2009-07-18
Peng Li
2009-07-21
Liang Zhao
2009-07-21
Peng Li
how to delay the plasma bonding?
Liang Zhao
2009-07-18
Hi,

I am working on microfluidic field. recently, I need bonding my device
using plasma treatment. I made my device by a PDMS sheet with channel
patterns on it and the substrate is a ITO glass where I've made the
microelectrodes on it. what I'm confused with is how to bond them together
with a good alignment? After bonding I have to drive the fluid into the
device using a syringe pump, so it's ideal to bond the device via a plasma
treatment. Unfortunately, it require one to put them together immadiately
after plasma treatment, but that's barely impossible to align the channels
with the ITO microelectrode.

Does any one have any experiences on it?  thanks a lot.

--
赵亮
南京大学化学化工学院
Liang Zhao
School of Chemistry and Chemical Engineering, Nanjing University
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Harrick Plasma, Inc.
Addison Engineering
MEMS Technology Review
University Wafer