Hey Liang,

You may try the method we are using here in our lab. Spray ethanol or
methanol on the PDMS surface after plasma treatment. Then you can align
PDMS slab with your patterns on the wafer under a microscope without
bonding them immediate. Don't spray too much or the PDMS slab will be too
"slippery" to align. After the alignment, you can bake the chip on a
hotplate at 85C for about 80 mins. Now you will have your chip. The trick
is that you need to design some "grooves" on your pattern so the achohol
can evaporate through them but not lift the PDMS.

Sincerely,

Peng Li
Research Assistant
Department of Mechanical Engineering & Applied Mechanics
University of Rhode Island
133D Kirk, 92 Upper College Road,
Kingston, RI  02881
Phone: (401) 874-2247

> Hi,
>
> I am working on microfluidic field. recently, I need bonding my device
> using plasma treatment. I made my device by a PDMS sheet with channel
> patterns on it and the substrate is a ITO glass where I've made the
> microelectrodes on it. what I'm confused with is how to bond them
> together
> with a good alignment? After bonding I have to drive the fluid into the
> device using a syringe pump, so it's ideal to bond the device via a
> plasma
> treatment. Unfortunately, it require one to put them together immadiately
> after plasma treatment, but that's barely impossible to align the
> channels
> with the ITO microelectrode.
>
> Does any one have any experiences on it?  thanks a lot.
>
> --
> ÕÔÁÁ
> ÄϾ©´óѧ»¯Ñ§»¯¹¤Ñ§Ôº
> Liang Zhao
> School of Chemistry and Chemical Engineering, Nanjing University