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MEMSnet Home: MEMS-Talk: how to delay the plasma bonding?
how to delay the plasma bonding?
2009-07-18
Liang Zhao
2009-07-18
Peng Li
2009-07-21
Liang Zhao
2009-07-21
Peng Li
how to delay the plasma bonding?
Peng Li
2009-07-21
Hey Liang,

I didn't have much success myself if no groove was used. The ethanol
between the two binding layers will lift the top PDMS slab if it has
nowhere to go during vaporization. You can definitely try it without using
any groove. It's just that you need to come out with an alternative way to
guarantee the bonding.

Peng


> Thanks Peng,
>
> I think it will be very helpful. And I am also interesting of the groove
> things you mention about. Is it necessary for the delay bonding?
>
> Thank you.
>
>


Sincerely,

Peng Li
Research Assistant
Department of Mechanical Engineering & Applied Mechanics
University of Rhode Island
133D Kirk, 92 Upper College Road,
Kingston, RI  02881
Phone: (401) 874-2247
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