We (Silicon Designs, Inc) build a capacitive Accelerometer.  All the
pertinent Info can be found on our web site:  www.silicondesigns.com.

If you have any further questions, feel free to contact me.

Jason Tauscher
Senior Research Engineer
Silicon Designs, Inc.

-----Original Message-----
From:   Cheng-Hsien Liu [mailto:[email protected]]
Sent:   Tuesday, September 29, 1998 4:50 AM
To:     [email protected]
Subject:        high precision accelerometer

Hi, MEMS colleague,

I am working on a project- high precision micromachined
accelerometer using electron tunneling transducer. I try to
make a comparison table about different micromachined
accelerometers.  If you work (or ever)on micromachined
accelerometers using any transducers (capacitive, piezoelectric,
piezoresist,..) (or know where I could find these information),
could you please email me the following information (or point out
where I could have the information):

1. Researcher or company (references)
2. Noise floor (?mg/root(Hz) or ?micro-g/root(Hz)) (How about
low frequency?)
3. Bandwidth (?Hz) (both sensor measurement bandwidth and resonant
frequency of proof mass)
4. Sensitivity (V/g)
5. Dynamic Range (?dB and ?g max)
6. Working principle (capacitive, tunneling, piezo....)
7. Fabrication (Bulk-micromachined, surface-micro...)
8. Proofmass (? milli-gram or ? micro-gram)
9. Device area (area including proofmass and cantilever beams or
membrane:?mmx?mm)
10. Operating Voltage (high voltage supply :V)
11. Open-Loop or closed-loop with feedback control circuit needed?
12. One axis, two axes, or three axes for each sensor unit?

The more details the better.  Your help is highly appreciated.
Best regards,