Try a HMDS treatment on your silicon wafer just before coating it with
PDMS. This way I was able to peel (with a lot of practice) wafer size
layers of PDMS with thicknesses from 10 to 50 microns.

Regards,
Sebastian Sosin

-----Original Message-----
From: Shah, Forum N [mailto:[email protected]]
Sent: Thursday, July 23, 2009 10:54 PM
To: [email protected]
Subject: [mems-talk] How to peel off PDMS

Hello All,

I am using Jersey cote for peeling off PDMS (about 50 micron) from
Silicon wafer.

It is peeling off but I am not able to peel it off as a continuous
intact layer. I am using a tweezer to peel it off.

If someone can suggest a way to peel it off intact it would be great.

Thanks in advance,
Forum