Hi everyone,
Does anybody know which photoresist with a thickness of 10 um (other than SU-8)
doesn't melt up to 180 C? How good is SPR? I want to pattern a photoresist layer
on si which permanently stays in the middle of device and acts as a spacer
between two chips. However, changing mechanical properties of the photoresist
with temperature doesn't matter. The device works at high temperature.
Any suggestions would be highly appreciated.
Thanks,
Reza
